The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Apr. 03, 2012
Ulrich Loering, Schwaebisch Gmuend, DE;
Ralf Mueller, Aalen, DE;
Hans-juergen Mann, Oberkochen, DE;
Norman Baer, Aalen, DE;
Ulrich Loering, Schwaebisch Gmuend, DE;
Ralf Mueller, Aalen, DE;
Hans-Juergen Mann, Oberkochen, DE;
Norman Baer, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely.