The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Aug. 26, 2009
Wouter Anthon Soer, Nijmegen, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Denny Mathew, Eindhoven, NL;
Hendrik Jan Kettelarij, Eindhoven, NL;
Fredericus Christiaan Van Den Heuvel, Waalre, NL;
Petrus Elizabeth Maria Kuijpers, Bergeijk, NL;
Wouter Anthon Soer, Nijmegen, NL;
Andrei Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Denny Mathew, Eindhoven, NL;
Hendrik Jan Kettelarij, Eindhoven, NL;
Fredericus Christiaan Van Den Heuvel, Waalre, NL;
Petrus Elizabeth Maria Kuijpers, Bergeijk, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. Each aperture has been manufactured by an anisotropic etching process.