The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Dec. 07, 2011
Aurelian Dodoc, Heidenheim, DE;
Christoph Zaczek, Heubach, DE;
Sascha Migura, Aalen-Unterrombach, DE;
Gerhard Braun, Ederheim, DE;
Hans-juergen Mann, Oberkochen, DE;
Hans-jochen Paul, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Christoph Zaczek, Heubach, DE;
Sascha Migura, Aalen-Unterrombach, DE;
Gerhard Braun, Ederheim, DE;
Hans-Juergen Mann, Oberkochen, DE;
Hans-Jochen Paul, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical imaging system serving for imaging a pattern arranged in an object plane of the imaging system into an image plane of the imaging system with the aid of electromagnetic radiation from a wavelength range around a main wavelength λhas a multiplicity of mirrors. Each mirror has a mirror surface having a reflective layer arrangement having a sequence of individual layers.