The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Jul. 16, 2012
Hyun Su Jun, Hwaseong-si, KR;
Yongkyu Kim, Osan-si, KR;
Doobyeong Park, Osan-si, KR;
Bongsun Kim, Hwaseong-si, KR;
Dongbock Lee, Suwon-si, KR;
Minjae NA, Suwon-si, KR;
Dongyoon Lee, Yongin-si, KR;
Jaehong Jeong, Suwon-si, KR;
Hyun Su Jun, Hwaseong-si, KR;
YongKyu Kim, Osan-si, KR;
DooByeong Park, Osan-si, KR;
Bongsun Kim, Hwaseong-si, KR;
Dongbock Lee, Suwon-si, KR;
Minjae Na, Suwon-si, KR;
Dongyoon Lee, Yongin-si, KR;
Jaehong Jeong, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-Si, Gyeonggi-Do, KR;
Abstract
Plasma equipments are provided. The plasma equipment includes a chamber in which a plasma reaction occurs, a detector outputting a spectrum signal in response to light generated from the plasma reaction, and a plasma monitoring module determining whether the spectrum signal includes an arcing signal or a hunting signal. Related methods are also provided.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile