The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Dec. 15, 2011
Applicants:

Hans-juergen Mann, Oberkochen, DE;

Johannes Zellner, Aalen, DE;

Aurelian Dodoc, Heidenheim, DE;

Marco Pretorius, Oberkochen, DE;

Christoph Menke, Oberkochen, DE;

Wilhelm Ulrich, Aalen, DE;

Martin Endres, Koenigsbronn, DE;

Inventors:

Hans-Juergen Mann, Oberkochen, DE;

Johannes Zellner, Aalen, DE;

Aurelian Dodoc, Heidenheim, DE;

Marco Pretorius, Oberkochen, DE;

Christoph Menke, Oberkochen, DE;

Wilhelm Ulrich, Aalen, DE;

Martin Endres, Koenigsbronn, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G02B 17/06 (2006.01); G02B 27/09 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0663 (2013.01); G02B 27/0905 (2013.01); G03F 7/70233 (2013.01);
Abstract

An imaging optical system has a plurality of mirrors, which image an object field in an object plane into an image field in an image plane. A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio greater than 1. A ratio of a minimal and a maximal transverse dimension of the object field can be less than 0.9.


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