The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Oct. 12, 2012
Applicant:
Nissan Chemical Industries, Ltd., Tokyo, JP;
Inventors:
Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); H01L 21/308 (2006.01); C08F 20/36 (2006.01); C08F 220/36 (2006.01); G03F 7/11 (2006.01); C08F 220/32 (2006.01); C08F 8/14 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3081 (2013.01); C08F 8/14 (2013.01); C08F 20/36 (2013.01); C08F 220/32 (2013.01); C08F 220/36 (2013.01); G03F 7/11 (2013.01); H01L 21/0271 (2013.01);
Abstract
It is aimed to enhance adhesiveness between a resist pattern formed on a resist underlayer film and to reduce an undercut of the resist pattern. An additive for a resist underlayer film-forming composition, including: a polymer having a structural unit of Formula (1): (where Ris a hydrogen atom or a methyl group; L is a divalent linking group; X is an acyloxy group having an amino group protected with a tert-butoxycarbonyl group or a nitrogen heterocycle protected with a tert-butoxycarbonyl group).