The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Feb. 22, 2008
Gilad Almogy, Kiriat Ono, IL;
Avishai Bartov, Hod-Hasharon, IL;
Juergen Frosien, Riemerling, DE;
Pavel Adamec, Haar, DE;
Helmut Banzhof, Poing, DE;
Gilad Almogy, Kiriat Ono, IL;
Avishai Bartov, Hod-Hasharon, IL;
Juergen Frosien, Riemerling, DE;
Pavel Adamec, Haar, DE;
Helmut Banzhof, Poing, DE;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A multi-beam scanning electron beam device () is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter () for emitting a plurality of electron beams (), at least one common electron beam optical element () having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element () for individually influencing the plurality of electron beams, a common objective lens assembly () for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen () for generation of a plurality of signal beams (), and a detection assembly () for individually detecting each signal beam on a corresponding detection element.