The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
Mar. 05, 2013
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Daimian Wang, Fremont, CA (US);
Oleg Khodykin, San Jose, CA (US);
Daniel Wack, Fredericksburg, VA (US);
Li Wang, San Ramon, CA (US);
Yanwei Liu, Danville, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 1/42 (2006.01); G02B 5/18 (2006.01); G01J 3/18 (2006.01); G01N 21/956 (2006.01); G03F 1/00 (2012.01); G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1838 (2013.01); G01J 3/18 (2013.01); G01N 21/956 (2013.01); G02B 5/203 (2013.01); G03F 1/0092 (2013.01); G01N 2021/95676 (2013.01);
Abstract
Spectral Purity Filters, or SPFs, are disclosed. Such SPFs are designed to block out the 1030 nm drive laser and other undesired out of band light in a EUV mask inspection system. Different phase grating configurations for near normal incidence and grazing incidence are provided in the present disclosure and are configured specifically for EUV mask inspection.