The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2015
Filed:
May. 30, 2008
Applicants:
Michael Adel, Zirchon Yaakov, IL;
Ellis Chang, Saratoga, CA (US);
Inventors:
Michael Adel, Zirchon Yaakov, IL;
Ellis Chang, Saratoga, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/47 (2006.01); G01N 21/892 (2006.01);
U.S. Cl.
CPC ...
G01N 21/47 (2013.01); G01N 21/892 (2013.01);
Abstract
A design feature in a design file including a pattern to be formed on a substrate may be selected as a metrology target, alignment target or inspection proxy. Metrology or inspection may be performed on the substrate using a printed feature on the substrate that corresponds to the design feature as a metrology target or inspection proxy.