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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9146479 B1

PDFFull Text
Date of Patent:
Sep. 29, 2015

Filed:

Nov. 19, 2013

Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage medium

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Izumi Hasegawa, Koshi, JP;

Hiroshi Tomita, Koshi, JP;

Shuji Iwanaga, Koshi, JP;

Tadashi Nishiyama, Koshi, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Posz Law Group, PLC

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7065 (2013.01); G03F 7/705 (2013.01); G03F 7/702 (2013.01);
Abstract

In the present invention, a planar distribution of pixel values in a picked-up substrate image is decomposed into a plurality of pixel value distribution components through use of a Zernike polynomial for each of substrate images; Zernike coefficients of the pixel value distribution components decomposed through use of the Zernike polynomial are calculated; a median value and values deviated from the median value by a predetermined value or more are extracted for every Zernike coefficients having a same couple of degrees from the calculated Zernike coefficients; substrate images having the extracted values are specified; and a substrate image being a defect inspection reference is created by combining the specified substrate images.

Find Patent Forward Citations

Hasegawa, Izumi. (2015). Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage medium (U.S. Patent No. 9146479). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9146479

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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