The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Oct. 12, 2010
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Bastiaan Lambertus Wilhelmus Marinus Van DE Ven, Rosmalen, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A position measurement system configured to measure a position quantity of a movable object in a measurement direction, the system including a radiation source, a beam splitter to split the radiation beam in a measurement beam and a reference beam, a first reflective surface mounted on the movable object to receive the measurement beam, a second reflective surface mounted on a reference object to receive the reference beam, and a detector arranged to receive a first and second reflected beam reflected by the first and second reflective surface, respectively, and configured to provide a signal representative of the position quantity of the movable object based on the first and the second beam, wherein the radiation source and detector are mounted on an object that is different from the movable object and the reference object.