The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Nov. 16, 2012
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Wen-Chang Tsai, Hsinchu, TW;
Shao-Yen Ku, Jhubei, TW;
Hsieh-Ching Wei, Hsinchu, TW;
Yuan Chih Chiang, Hsinchu, TW;
Jui-Chuan Chang, Hsinchu, TW;
Yung-Li Tsai, Houlong Town, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67253 (2013.01); H01L 21/67017 (2013.01); H01L 21/67023 (2013.01); H01L 21/67028 (2013.01); H01L 21/67063 (2013.01); H01L 21/6773 (2013.01); H01L 21/67242 (2013.01); H01L 21/67389 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67069 (2013.01); H01L 21/67075 (2013.01); H01L 21/67265 (2013.01);
Abstract
A loading port includes a housing and a plurality of stations defined in the housing configured to receive a front opening universal pod (FOUP). The loading port further includes a connector configured to receive an inert gas. At least one of the plurality of stations is configured to deliver the inert gas to the FOUP to purge an interior of the FOUP of moisture. A system including the loading port and a method of using the system are also described.