The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Dec. 13, 2011
Antonius Theodorus Wilhelmus Kempen, 's-Hertogenbosch, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Christian Wagner, Duizel, NL;
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Antonius Theodorus Wilhelmus Kempen, 's-Hertogenbosch, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Christian Wagner, Duizel, NL;
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A radiation source includes a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma; and a catch configured to catch fuel droplets that pass the plasma formation location. The catch includes a container configured to contain a fluid; a driver configured to drive the fluid, to cause the fluid to move; the catch being configured such that the fuel droplets are incident on that moving fluid.