The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Mar. 26, 2012
Herman Vogel, Sandy Hook, CT (US);
Jeroen Gerard Gosen, Geldrop, NL;
Bart Dinand Paarhuis, Waalre, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Jinggao LI, Fairfield, CT (US);
Herman Vogel, Sandy Hook, CT (US);
Jeroen Gerard Gosen, Geldrop, NL;
Bart Dinand Paarhuis, Waalre, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Jinggao Li, Fairfield, CT (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An apparatus, in an embodiment, having a patterning device support including a first planar element having a first flow-restricting surface; a second planar element including a second flow-restricting surface facing the first flow-restricting surface; a support driver to linearly move the support along a certain direction relative to the second planar element, wherein the first and/or second flow-restricting surface has one or more projections and/or recesses between the first and second flow-restricting surfaces, and wherein the projection and/or recess on the first and/or second flow-restricting surface is arranged to provide a flow resistance, per unit width of the first and/or second flow-restricting surface perpendicular to the flow, that is lower against flow that is parallel to the certain direction than against flow that is perpendicular to the certain direction. The flow-restricting surfaces may direct gas flow onto a driver part that generates heat.