The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Sep. 18, 2013
Globalfoundries Inc., Grand Cayman, KY;
Bharat Krishnan, Mechanicville, NY (US);
Jinping Liu, Ballston Lake, NY (US);
Zhao Lun, Ballston Lake, NY (US);
Hui Zhan, Clifton Park, NY (US);
Bongki Lee, Malta, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
A semiconductor structure includes a semiconductor substrate, an active region and a dummy gate structure disposed over the active region. A sacrificial conformal layer, including a bottom oxide layer and a top nitride layer are provided over the dummy gate structure and active region to protect the dummy gate during source and drain implantation. The active region is implanted using dopants such as, a n-type dopant or a p-type dopant to create a source region and a drain region in the active region, after which the sacrificial conformal layer is removed.