The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Nov. 12, 2012
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Toto Ltd., Kitakyushu-shi, Fukuoka, JP;
Yuta Ebine, Tokyo, JP;
Shinichi Tomita, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Toshihiro Aoshima, Kitakyushu, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
TOTO LTD., Kitakyushu-shi, Fukuoka, JP;
Abstract
In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector () on the same axis as the X-ray detection surface of the X-ray detector ((-)) is disposed integrally with or independently from the X-ray detector (), an X-ray signal being detected by the X-ray detector () simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector ().