The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Nov. 04, 2014
Applicant:

Bruker Nano, Inc., Santa Barbara, CA (US);

Inventors:

Markus B. Raschke, Boulder, CO (US);

Stefan B. Kaemmer, Santa Barbara, CA (US);

Stephen C. Minne, Santa Barbara, CA (US);

Chanmin Su, Ventura, CA (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 13/16 (2006.01); G01Q 10/00 (2010.01); G01Q 60/00 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01);
Abstract

An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.


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