The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Jun. 21, 2012
Jozef Kudela, San Jose, CA (US);
Tsutomu Tanaka, Santa Clara, CA (US);
Carl A. Sorensen, Morgan Hill, CA (US);
Suhail Anwar, San Jose, CA (US);
John M. White, Hayward, CA (US);
Ranjit Indrajit Shinde, Bangalore, IN;
Seon-mee Cho, Santa Clara, CA (US);
Douglas D. Truong, San Jose, CA (US);
Jozef Kudela, San Jose, CA (US);
Tsutomu Tanaka, Santa Clara, CA (US);
Carl A. Sorensen, Morgan Hill, CA (US);
Suhail Anwar, San Jose, CA (US);
John M. White, Hayward, CA (US);
Ranjit Indrajit Shinde, Bangalore, IN;
Seon-Mee Cho, Santa Clara, CA (US);
Douglas D. Truong, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.