The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Sep. 14, 2012
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Andrey Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Andrey Mikhailovich Yakunin, Eindhoven, NL;
Martin Jacobus Johan Jak, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
According to an aspect of the present invention, a spectral purity filter includes an aperture, the aperture being arranged to diffract a first wavelength of radiation and to allow at least a portion of a second wavelength of radiation to be transmitted through the aperture, the second wavelength of radiation being shorter than the first wavelength of radiation, wherein the aperture has a diameter greater than 20 μm.