The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Dec. 18, 2008
Hideo Hada, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Kyoko Ohshita, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Yasuhiro Yoshii, Kawasaki, JP;
Hideo Hada, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Keita Ishiduka, Kawasaki, JP;
Kensuke Matsuzawa, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Kyoko Ohshita, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Yasuhiro Yoshii, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-1) shown below: wherein Rrepresents a hydrocarbon group which may have a substituent exclusive of a nitrogen atom; each of Qand Qindependently represents a single bond or a divalent linkage group; Yrepresents an alkylene group or fluorinated alkyl group of 1 to 4 carbon atoms; and Zrepresents an organic cation exclusive of an ion represented by general formula (w-1).