The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Aug. 13, 2014
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23C 16/455 (2006.01); H01L 21/30 (2006.01); H01L 21/02 (2006.01); C23C 16/04 (2006.01); C23C 16/40 (2006.01); H01L 21/762 (2006.01); C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); H01L 21/30 (2013.01); H01L 21/02164 (2013.01); H01L 21/0228 (2013.01); H01L 21/76224 (2013.01); C23C 16/045 (2013.01); C23C 16/402 (2013.01); C23C 16/45519 (2013.01); C23C 16/45551 (2013.01); C23C 14/00 (2013.01); C23C 16/45529 (2013.01);
Abstract
A film deposition method, in which a film of a reaction product of a first reaction gas, which tends to be adsorbed onto hydroxyl radicals, and a second reaction gas capable of reacting with the first reaction gas is formed on a substrate provided with a concave portion, includes a step of controlling an adsorption distribution of the hydroxyl radicals in a depth direction in the concave portion of the substrate; a step of supplying the first reaction gas on the substrate onto which the hydroxyl radicals are adsorbed; and a step of supplying the second reaction gas on the substrate onto which the first reaction gas is adsorbed.
Published as:
US2013164942A1; CN103184430A; KR20130075695A; JP2013135154A; TW201341576A; US8835332B2; US2014349032A1; JP5679581B2; US9023738B2; KR101595148B1; CN103184430B; TWI551715B;