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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8993963 B1

PDFFull Text
Date of Patent:
Mar. 31, 2015

Filed:

Jul. 07, 2014

Mounting structures for multi-detector electron microscopes

Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Hanno Sebastian von Harrach, Eindhoven, NL;

Bert Henning Freitag, Eindhoven, NL;

Pleun Dona, Veldhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:

Scheinberg & Associates, PC

Michael O. Scheinberg

Primary Examiner:

David A Vanore

Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 49/06 (2006.01); H01J 37/28 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2442 (2013.01); H01J 2237/28 (2013.01); H01J 2237/2802 (2013.01); G01N 23/225 (2013.01);
Abstract

A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.

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von Harrach, Hanno. (2015). Mounting structures for multi-detector electron microscopes (U.S. Patent No. 8993963). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8993963

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