The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Dec. 20, 2011
Hiroki Yamamoto, Kanagawa, JP;
Tadashi Morita, Kanagawa, JP;
Hideo Ohno, Miyagi, JP;
Shoji Ikeda, Miyagi, JP;
Hiroki Yamamoto, Kanagawa, JP;
Tadashi Morita, Kanagawa, JP;
Hideo Ohno, Miyagi, JP;
Shoji Ikeda, Miyagi, JP;
Tohoku University, Miyagi, JP;
Ulvac, Inc., Kanagawa, JP;
Abstract
[Object] To provide a method of manufacturing a perpendicular magnetization-type magnetic element, which does not need a step of depositing MgO. [Solving Means] The method of manufacturing a magnetoresistive elementaccording to the present invention includes laminating a first layeron a base, the first layerincluding a material containing at least one of Co, Ni, and Fe. Next, a second layeris laminated on the first layer, the second layerincluding Mg. Next, the Mg in the second layeris oxidized to form MgO by applying an oxidation treatment to a laminated body including the first layerand the second layer. Next, the second layeris crystallized by applying a heat treatment to the laminated body, and the first layeris caused to be perpendicularly magnetized. According to the manufacturing method, it is possible to manufacture a perpendicular magnetization-type CoFeB—MgO magnetic element without causing a problem arising from the deposition of MgO.