The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
May. 23, 2012
Tomonori Nakano, Tokyo, JP;
Kotoko Urano, Tokyo, JP;
Hiroyuki Ito, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In order to provide a multipole measurement apparatus that can easily obtain table data for an aberration corrector that corrects the aberrations in a charged particle beam apparatus, the multipole measurement apparatus, which is provided with an optical system (), a space into which an aberration corrector () is to be inserted, and a position detector (), measures the relationship between the incident position and angle of a primary charged particle beam on the aberration corrector () at a plurality of points, the irradiation position upon the position detector (), and a multipole, in a state of having a multipole field excited and in a state of not having a multipole field excited, so as to extract multipole components contained in the measurement executed in the state of having the multipole field excited.