The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
May. 14, 2012
Atsushi Taniguchi, Tokyo, JP;
Taketo Ueno, Tokyo, JP;
Shunichi Matsumoto, Tokyo, JP;
Yukihiro Shibata, Tokyo, JP;
Toshifumi Honda, Tokyo, JP;
Atsushi Taniguchi, Tokyo, JP;
Taketo Ueno, Tokyo, JP;
Shunichi Matsumoto, Tokyo, JP;
Yukihiro Shibata, Tokyo, JP;
Toshifumi Honda, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.