The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
May. 11, 2011
Naoki Sakamoto, Hitachinaka, JP;
Kaname Takahashi, Hitachinaka, JP;
Shigeru Haneda, Hitachinaka, JP;
Shinsuke Kawanishi, Hitachinaka, JP;
Naoki Sakamoto, Hitachinaka, JP;
Kaname Takahashi, Hitachinaka, JP;
Shigeru Haneda, Hitachinaka, JP;
Shinsuke Kawanishi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.