The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2015

Filed:

Apr. 19, 2011
Applicants:

Yinghua Piao, Shanghai, CN;

Dongping Wu, Shanghai, CN;

Shili Zhang, Uppsala, SE;

Inventors:

Yinghua Piao, Shanghai, CN;

Dongping Wu, Shanghai, CN;

Shili Zhang, Uppsala, SE;

Assignee:

Fudan University, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); G01N 27/403 (2006.01); H01L 27/108 (2006.01); H01L 21/70 (2006.01); H01L 29/78 (2006.01); H01L 21/265 (2006.01); H01L 29/66 (2006.01); H01L 29/45 (2006.01); H01L 29/47 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7839 (2013.01); H01L 21/26586 (2013.01); H01L 29/66643 (2013.01); H01L 29/66659 (2013.01); H01L 29/7835 (2013.01); H01L 29/45 (2013.01); H01L 29/456 (2013.01); H01L 29/47 (2013.01);
Abstract

The present invention is related to microelectronic device technologies. A method for making an asymmetric source-drain field-effect transistor is disclosed. A unique asymmetric source-drain field-effect transistor structure is formed by changing ion implantation tilt angles to control the locations of doped regions formed by two ion implantation processes. The asymmetric source-drain field-effect transistor has structurally asymmetric source/drain regions, one of which is formed of a P-N junction while the other one being formed of a mixed junction, the mixed junction being a mixture of a Schottky junction and a P-N junction.


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