The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Feb. 03, 2014
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventors:
Kai-Chung Hou, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λand λ, with λ≠λ; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ; a main pulse seed laser generating a laser output having wavelength, λ; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.