The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Feb. 13, 2012
Sohan Mehta, Saratoga Springs, NY (US);
Tong Qing Chen, Fishkill, NY (US);
Vikrant Chauhan, Beacon, NY (US);
Ravi Srivastava, Fishkill, NY (US);
Catherine Labelle, Wappingers Falls, NY (US);
Mark Kelling, Marlboro, NY (US);
Sohan Mehta, Saratoga Springs, NY (US);
Tong Qing Chen, Fishkill, NY (US);
Vikrant Chauhan, Beacon, NY (US);
Ravi Srivastava, Fishkill, NY (US);
Catherine Labelle, Wappingers Falls, NY (US);
Mark Kelling, Marlboro, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
An illustrative test structure is disclosed herein that includes a plurality of first line features and a plurality of second line features. In this embodiment, each of the second line features have first and second opposing ends and the first and second line features are arranged in a grating pattern such that the first ends of the first line features are aligned to define a first side of the grating structure and the second ends of the first features are aligned to define a second side of the grating structure that is opposite the first side of the grating structure. The first end of the second line features has a first end that extends beyond the first side of the grating structure while the second end of the second line features has a first end that extends beyond the second side of the grating structure.