The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Jun. 27, 2011
Gwo-chuan Tzu, Sunnyvale, CA (US);
Xiaoxiong Yuan, San Jose, CA (US);
Amit Khandelwal, San Jose, CA (US);
Benjamin Cheng Wang, San Jose, CA (US);
Avgerinos V. Gelatos, Redwood City, CA (US);
Kai Wu, Palo Alto, CA (US);
Michael P. Karazim, San Jose, CA (US);
Jing Lin, Mountain View, CA (US);
Olkan Cuvalci, Sunnyvale, CA (US);
Gwo-Chuan Tzu, Sunnyvale, CA (US);
Xiaoxiong Yuan, San Jose, CA (US);
Amit Khandelwal, San Jose, CA (US);
Benjamin Cheng Wang, San Jose, CA (US);
Avgerinos V. Gelatos, Redwood City, CA (US);
Kai Wu, Palo Alto, CA (US);
Michael P. Karazim, San Jose, CA (US);
Jing Lin, Mountain View, CA (US);
Olkan Cuvalci, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support may include a body; an inner ring disposed about the body; an outer ring disposed about the inner ring forming a first opening therebetween; a first seal ring disposed above the first opening; a shadow ring disposed above the inner ring, extending inward from the outer ring and forming a second opening between the shadow and outer rings; a second seal ring disposed above the second opening; a space at least partially defined by the body and the inner, outer, first, second, and shadow rings; a first gap defined between a processing surface of a substrate when present and the shadow ring; and a plurality of second gaps fluidly coupled to the space; wherein the first gap and the plurality of second gaps are configured such that, when a substrate is present, a gas provided to the space flows out of the space through the first gap.