The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2014

Filed:

Feb. 14, 2014
Applicant:

Suvolta, Inc., Los Gatos, CA (US);

Inventors:

Thomas Hoffmann, Los Gatos, CA (US);

Pushkar Ranade, Los Gatos, CA (US);

Lucian Shifren, San Jose, CA (US);

Scott E. Thompson, Gainesville, FL (US);

Assignee:

SuVOLTA, Inc., Los Gatos, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/22 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/22 (2013.01); H01L 29/66477 (2013.01);
Abstract

Multiple transistor types are formed in a common epitaxial layer by differential out-diffusion from a doped underlayer. Differential out-diffusion affects the thickness of a FET channel, the doping concentration in the FET channel, and distance between the gate dielectric layer and the doped underlayer. Differential out-diffusion may be achieved by differentially applying a dopant migration suppressor such as carbon; differentially doping the underlayer with two or more dopants having the same conductivity type but different diffusivities; and/or differentially applying thermal energy.


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