The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2014

Filed:

Mar. 15, 2013
Applicant:

Asia Pacific Microsystems, Inc., Hsinchu, TW;

Inventors:

Hung-Lin Yin, Hsinchu, TW;

Jerwei Hsieh, Hsinchu, TW;

Li-Yuan Lin, Hsinchu, TW;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01); H01L 23/498 (2006.01); H01L 21/762 (2006.01); H01L 23/10 (2006.01); H01L 21/50 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 25/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49866 (2013.01); H01L 21/76251 (2013.01); H01L 23/10 (2013.01); H01L 21/50 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/29 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01); H01L 24/95 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); B81C 1/00269 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48463 (2013.01); H01L 2224/29084 (2013.01); H01L 2224/1308 (2013.01); H01L 2224/83948 (2013.01); H01L 2224/81011 (2013.01); H01L 2224/27462 (2013.01); H01L 2224/03614 (2013.01); H01L 2224/32148 (2013.01); H01L 2224/81825 (2013.01); H01L 2224/32146 (2013.01); H01L 2224/81948 (2013.01); H01L 2224/81013 (2013.01); H01L 2224/32235 (2013.01); H01L 2224/48148 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/11 (2013.01); H01L 24/27 (2013.01); H01L 24/48 (2013.01); H01L 2224/0347 (2013.01); H01L 2224/05073 (2013.01); H01L 2224/05166 (2013.01); H01L 2224/05171 (2013.01); H01L 2224/05655 (2013.01); H01L 2224/05669 (2013.01); H01L 2224/1145 (2013.01); H01L 2224/11462 (2013.01); H01L 2224/1147 (2013.01); H01L 2224/13082 (2013.01); H01L 2224/13111 (2013.01); H01L 2224/13139 (2013.01); H01L 2224/16148 (2013.01); H01L 2224/16238 (2013.01); H01L 2224/16507 (2013.01); H01L 2224/2745 (2013.01); H01L 2224/29011 (2013.01); H01L 2224/2908 (2013.01); H01L 2224/29082 (2013.01); H01L 2224/29111 (2013.01); H01L 2224/29139 (2013.01); H01L 2224/32238 (2013.01); H01L 2224/32503 (2013.01); H01L 2224/32507 (2013.01); H01L 2224/48228 (2013.01); H01L 2224/73103 (2013.01); H01L 2224/73203 (2013.01); H01L 2224/73215 (2013.01); H01L 2224/81121 (2013.01); H01L 2224/81193 (2013.01); H01L 2224/81203 (2013.01); H01L 2224/83013 (2013.01); H01L 2224/83022 (2013.01); H01L 2224/83121 (2013.01); H01L 2224/83193 (2013.01); H01L 2224/83203 (2013.01); H01L 2224/83805 (2013.01); H01L 2224/83825 (2013.01); H01L 2224/9202 (2013.01); H01L 2224/92147 (2013.01); H01L 2224/95 (2013.01); H01L 2224/81022 (2013.01); H01L 2224/2747 (2013.01); H01L 2224/16503 (2013.01); H01L 2224/83011 (2013.01); H01L 2224/11614 (2013.01); H01L 2224/27614 (2013.01); B81C 2203/019 (2013.01);
Abstract

A substrate bonding method comprises the following steps. Firstly, a first substrate and a second substrate are provided, wherein a surface of the first substrate is covered by a first Ag layer and a surface of the second substrate is covered by a second Ag layer and a metallic layer from bottom to top, wherein the metallic layer comprises a first Sn layer. Secondly, a bonding process is performed by aligning the first and second substrates followed by bringing the metallic layer into contact with the first Ag layer followed by applying a load while heating to a predetermined temperature in order to form Ag3Sn intermetallic compounds. Finally, cool down and remove the load to complete the bonding process.


Find Patent Forward Citations

Loading…