The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
May. 24, 2011
Bert Jan Claessens, Spalbeek, BE;
Heine Melle Mulder, Veldhoven, NL;
Paul Van Der Veen, Waalre, NL;
Wilfred Edward Endendijk, Steensel, NL;
Willem Jan Bouman, Moergestel, NL;
Bert Pieter Van Drieënhuizen, Veldhoven, NL;
Jozef Ferdinand Dymphna Verbeeck, Belgium, BE;
Marc Hendricus Margaretha Dassen, Eindhoven, NL;
Thijs Johan Henry Hollink, Eindhoven, NL;
Bert Jan Claessens, Spalbeek, BE;
Heine Melle Mulder, Veldhoven, NL;
Paul Van Der Veen, Waalre, NL;
Wilfred Edward Endendijk, Steensel, NL;
Willem Jan Bouman, Moergestel, NL;
Bert Pieter Van Drieënhuizen, Veldhoven, NL;
Jozef Ferdinand Dymphna Verbeeck, Belgium, BE;
Marc Hendricus Margaretha Dassen, Eindhoven, NL;
Thijs Johan Henry Hollink, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.