The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Sep. 30, 2010
Applicants:
Vincent Mevellec, Chaville, FR;
Dominique Suhr, Chatenay Malabry, FR;
Inventors:
Vincent Mevellec, Chaville, FR;
Dominique Suhr, Chatenay Malabry, FR;
Assignee:
Alchimer, Massy, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); C23C 18/32 (2006.01); C23C 18/18 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1882 (2013.01); C23C 18/32 (2013.01); C23C 18/1879 (2013.01); C23C 18/1696 (2013.01); C23C 18/1653 (2013.01);
Abstract
The present invention relates to a solution and a method for activating the oxidized surface of a substrate, in particular of a semiconducting substrate, for its subsequent coating by a metal layer deposited by the electroless method. According to the invention, this composition contains: