The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
May. 30, 2013
Globalfoundries Inc., Grand Cayman, KY;
Kunaljeet Tanwar, Slingerlands, NY (US);
Xunyuan Zhang, Albany, NY (US);
Xiuyu Cai, Niskayuna, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
One illustrative method disclosed herein includes forming at least one layer of insulating material above a conductive structure, forming a patterned hard mask comprised of metal above the layer of insulating material, performing at least one etching process to define a cavity in the layer of insulating material, forming a layer of sacrificial material so as to overfill the cavity, performing at least one planarization process to remove a portion of the layer of sacrificial material and the patterned hard mask while leaving a remaining portion of the layer of sacrificial material within the cavity, and removing the remaining portion of the layer of sacrificial material positioned within the cavity.