The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Apr. 28, 2014
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Chun Hsiung Tsai, Xinpu Township, Hsinchu County, TW;
Sheng-Wen Yu, New Taipei, TW;
De-Wei Yu, Ping-Tung, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A system includes a computer-readable medium that stores a plurality of instructions for execution by at least one computer processor. The instructions include receiving a reflectivity measurement on a semiconductor wafer and generating a reflectivity map based on the received reflectivity measurement. The instructions determine a spatial distance for a selected reflectivity change using the generated reflectivity map. Subsequently, the determined spatial distance is compared with a thermal diffusion length of a first anneal process technique. In embodiments, the system further includes a light source and a reflectivity measurement tool.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile