The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Feb. 22, 2011
Applicants:
Hans-juergen Mann, Oberkochen, DE;
Armin Schoeppach, Aalen, DE;
Johannes Zellner, Aalen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 26/12 (2006.01); G03F 7/20 (2006.01); G02B 17/06 (2006.01); G02B 26/06 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0657 (2013.01); G03F 7/70266 (2013.01); G02B 26/06 (2013.01); G03F 7/70233 (2013.01);
Abstract
An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.