logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8867818 B1

PDFFull Text
Date of Patent:
Oct. 21, 2014

Filed:

Jul. 15, 2010

Method of creating template for matching, as well as device for creating template

Applicants:

Ryoichi Matsuoka, Yotsukaido, JP;

Akiyuki Sugiyama, Hitachinaka, JP;

Yasutaka Toyoda, Mito, JP;

Inventors:

Ryoichi Matsuoka, Yotsukaido, JP;

Akiyuki Sugiyama, Hitachinaka, JP;

Yasutaka Toyoda, Mito, JP;

Assignee:

Hitachi High-Technologies Corporation, Tokyo, JP;

Attorney:

Mattingly & Malur, PC

Primary Examiner:

Stephen R Koziol

Assistant Examiner:

Delomia Gilliard

Int. Cl.
CPC ...
G06K 9/50 (2006.01); H01J 37/28 (2006.01); G01N 23/225 (2006.01); G06T 7/00 (2006.01); G06K 9/62 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01L 22/12 (2013.01); G06T 2207/30148 (2013.01); G01N 23/225 (2013.01); H01J 2237/221 (2013.01); G06T 7/001 (2013.01); H01J 2237/2817 (2013.01); G06K 9/6255 (2013.01);
Abstract

Disclosed is a method wherein a template for template matching is created with high accuracy and high efficiency. With respect to each individual pattern constituting a basic circuit, pattern information regarding a plurality of layers in a semiconductor device is stored in a library. On the basis of the designation of the position and the layer, pattern information regarding the designated position and layer is extracted from the pattern information stored in the library. A template is created on the basis of the extracted pattern information.

Find Patent Forward Citations

Matsuoka, Ryoichi. (2014). Method of creating template for matching, as well as device for creating template (U.S. Patent No. 8867818). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8867818

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…