The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2014

Filed:

Feb. 07, 2014
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Chung Woh Lai, Singapore, SG;

Xiao Hu Liu, Briarcliff Manor, NY (US);

Anita Madan, Danbury, CT (US);

Klaus W. Schwarz, Somers, NY (US);

J. Campbell Scott, Los Gatos, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/322 (2006.01); A61N 5/00 (2006.01); G21G 5/00 (2006.01); H01L 21/268 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3221 (2013.01); H01L 21/3226 (2013.01); H01L 21/268 (2013.01); H01L 29/1054 (2013.01); H01L 21/2686 (2013.01); H01L 29/7842 (2013.01);
Abstract

A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser manipulates the plurality of dislocations on the surface portion of the semiconductor body by adjusting the temperature and the scan speed of the laser beam.


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