The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Nov. 22, 2004
Bernhard Gellrich, Aalen, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Jens Kugler, Heubach, DE;
Armin Schoeppach, Aalen, DE;
Christian Zengerling, Muehlhausen, DE;
Stephane Bruynooghe, Aalen, DE;
Bernhard Gellrich, Aalen, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Jens Kugler, Heubach, DE;
Armin Schoeppach, Aalen, DE;
Christian Zengerling, Muehlhausen, DE;
Stephane Bruynooghe, Aalen, DE;
ASML Netherlands B.V., Veldhoven, NB, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.