The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Oct. 22, 2009
Christian Marinus Leewis, Maastricht, NL;
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Karel Diederick Van Der Mast, Helmond, NL;
Peter Clement Paul Vanoppen, Hechtel-Ekse, BE;
Ruben Alvarez Sanchez, Veldhoven, NL;
Christian Marinus Leewis, Maastricht, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Karel Diederick Van Der Mast, Helmond, NL;
Peter Clement Paul Vanoppen, Hechtel-Ekse, BE;
Ruben Alvarez Sanchez, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a method for determining one or more properties of a substrate, scatterometry spectra can be measured from one or more targets on the substrate. Reconstructions of each of said spectra can be performed to derive one or more values for the property of the substrate, by comparing representations of each of the measured spectra with one or more modeled representations of spectra calculated using variable parameter values. At least one parameter in the reconstruction for each spectrum can be linked to the value of the parameter used in the reconstruction for a different spectrum.