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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8841193 B1

PDFFull Text
Date of Patent:
Sep. 23, 2014

Filed:

Jun. 26, 2013

Semiconductor structure and method for slimming spacer

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Ted Ming-Lang Guo, Tainan, TW;

Chin-Cheng Chien, Tainan, TW;

Shu-Yen Chan, Changhua County, TW;

Ling-Chun Chou, Yunlin County, TW;

Tsung-Hung Chang, Yunlin County, TW;

Chun-Yuan Wu, Yunlin County, TW;

Assignee:

United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;

Attorneys:

Winston Hsu

Scott Margo

Primary Examiner:

Timor Karimy

Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66477 (2013.01); H01L 29/66545 (2013.01); H01L 29/7847 (2013.01); H01L 29/7843 (2013.01); H01L 29/6653 (2013.01);
Abstract

A semiconductor structure including a substrate and a gate structure disposed on the substrate is disclosed. The gate structure includes a gate dielectric layer disposed on the substrate, a gate material layer disposed on the gate dielectric layer and an outer spacer with a rectangular cross section. The top surface of the outer spacer is lower than the top surface of the gate material layer.

Find Patent Forward Citations

Guo, Ted Ming-Lang. (2014). Semiconductor structure and method for slimming spacer (U.S. Patent No. 8841193). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8841193

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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