The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Aug. 19, 2010
Arie Jeffrey Den Boef, Waalre, NL;
Vadim Yevgenyevich Banine, Eendracht, NL;
Sander Frederik Wuister, Eindhoven, NL;
Luigi Scaccabarozzi, Valkenswaard, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Vadim Yevgenyevich Banine, Eendracht, NL;
Sander Frederik Wuister, Eindhoven, NL;
Luigi Scaccabarozzi, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In an aspect, an inspection method for detecting the presence or absence of a defect on an object, the object comprising a recess having a physical depth, is disclosed. The method includes directing radiation at the object, the radiation having a wavelength that is substantially equal to twice an optical depth of the recess, detecting radiation that is re-directed by the object or a defect on the object, and determining the presence or absence of a defect from the re-directed radiation.