The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Sep. 17, 2010
Hironori Ogawa, Hitachinaka, JP;
Masahiro Koyama, Tsuchiura, JP;
Nobuo Shibata, Kasumigaura, JP;
Masaru Matsushima, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Katsunori Onuki, Hitachi, JP;
Yoshimasa Fukushima, Hitachinaka, JP;
Hironori Ogawa, Hitachinaka, JP;
Masahiro Koyama, Tsuchiura, JP;
Nobuo Shibata, Kasumigaura, JP;
Masaru Matsushima, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Katsunori Onuki, Hitachi, JP;
Yoshimasa Fukushima, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motorsare disposed on four sides of a baseto be distanced from an electron beam projection position (the center of the stage device), respectively. The basehas dimensions substantially equivalent to minimum dimensions determined by the size of a top tableand a movable stroke. Linear motor statorsare configured to have a 'C-shaped' structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guidescomposed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.