The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Mar. 16, 2010
Hiromitsu Sakaue, Yamanashi, JP;
Takashi Horiuchi, Yamanashi, JP;
Hiromitsu Sakaue, Yamanashi, JP;
Takashi Horiuchi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing system includes a processing chamber that performs a preset process on a plurality of substrates in a batch-type manner; a substrate mounting table, installed within the processing chamber, configured to mount the plurality of substrates on a concentric circle and configured to be rotatable forward and backward; substrate accommodation units configured to accommodate the plurality of substrates in multi-stages in a vertical direction; substrate holders and configured to transfer the substrates between the substrate accommodation units and the processing chamber; elevating mechanisms configured to move the substrate accommodation units up and down. Unprocessed substrates are mounted on the substrate mounting table while the substrate mounting table is being rotated in one direction. After the completion of the processing of the substrates, unloading of processed substrates and loading of new unprocessed substrates are performed while the substrate mounting table is rotated in the another direction.