The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jun. 13, 2012
David Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Rudolf M. Von Buenau, Jena, DE;
Hans-juergen Mann, Oberkochen, DE;
Alexander Epple, Aalen, DE;
David Shafer, Fairfield, CT (US);
Wilhelm Ulrich, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Rudolf M. Von Buenau, Jena, DE;
Hans-Juergen Mann, Oberkochen, DE;
Alexander Epple, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A catadioptric projection objective for imaging a pattern onto an image plane includes: a first objective part for imaging the pattern into a first intermediate image; a second objective part for imaging the first intermediate image into a second intermediate image; and a third objective part for imaging the second intermediate image onto the image plane. A first concave mirror having a continuous mirror surface and a second concave mirror having a continuous mirror surface are upstream of the second intermediate image. A pupil surface is formed between the object plane and the first intermediate image, between the first and the second intermediate image, and between the second intermediate image and the image plane. A plate having essentially parallel plate surfaces is positioned in the first objective part near the pupil surface. At least one plate surface is aspherized to correct for aberrations.