The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jun. 21, 2010
Applicants:
Dongsub Choi, Sungnam, KR;
Amir Widmann, Sunnyvale, CA (US);
Zain Saidin, San Mateo, CA (US);
Frank Laske, Weilburg, DE;
John Robinson, Austin, TX (US);
Inventors:
DongSub Choi, Sungnam, KR;
Amir Widmann, Sunnyvale, CA (US);
Zain Saidin, San Mateo, CA (US);
Frank Laske, Weilburg, DE;
John Robinson, Austin, TX (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A combined metrology mark, a system, and a method for calculating alignment on a semiconductor circuit are disclosed. The combined metrology mark may include a mask misregistration structure and a wafer overlay mark structure.