The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Aug. 10, 2012
Steven T. Mayer, Lake Oswego, OR (US);
Marshall R. Stowell, Wilsonville, OR (US);
John S. Drewery, Santa Clara, CA (US);
Richard S. Hill, Atherton, CA (US);
Timothy M. Archer, Lake Oswego, OR (US);
Avishai Kepten, Lake Oswego, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
Marshall R. Stowell, Wilsonville, OR (US);
John S. Drewery, Santa Clara, CA (US);
Richard S. Hill, Atherton, CA (US);
Timothy M. Archer, Lake Oswego, OR (US);
Avishai Kepten, Lake Oswego, OR (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
Methods and apparatus are provided for planar metal plating on a workpiece having a surface with recessed regions and exposed surface regions; comprising the steps of: causing a plating accelerator to become attached to said surface including the recessed and exposed surface regions; selectively removing the plating accelerator from the exposed surface regions without performing substantial metal plating on the surface; and after removal of plating accelerator is at least partially complete, plating metal onto the surface, whereby the plating accelerator remaining attached to the surface increases the rate of metal plating in the recessed regions relative to the rate of metal plating in the exposed surface regions.