The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Apr. 26, 2010
Cheng-ming Lin, Siluo Township, TW;
Chien-chao Huang, Hsinchu, TW;
Jong-yuh Chang, Jhubei, TW;
Chia-wei Chang, Taipei, TW;
Boming Hsu, Tainan, TW;
Cheng-Ming Lin, Siluo Township, TW;
Chien-Chao Huang, Hsinchu, TW;
Jong-Yuh Chang, Jhubei, TW;
Chia-Wei Chang, Taipei, TW;
Boming Hsu, Tainan, TW;
Abstract
An apparatus for mounting a pellicle onto a mask is provided. In one embodiment, the apparatus comprises a base provided with a track; a dummy plate holder coupled to the base, the dummy plate holder for receiving a dummy plate having an elevated portion on one side thereof; a mask holder for receiving a mask, the mask holder slidably coupled to the base; a pellicle holder for receiving a pellicle frame, the pellicle holder slidably coupled to the base; and drive means being adapted to drive the pellicle holder along the track towards the dummy plate holder, wherein during operation when the pellicle frame is mounted onto the mask causing the mask to contact the dummy plate, the mounting pressure in the mask is distributed by way of the elevated portion in the dummy plate, thus reducing distortion in the mask.