The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
May. 17, 2012
Manchao Xiao, San Diego, CA (US);
Xinjian Lei, Vista, CA (US);
Bing Han, Beijing, CN;
Mark Leonard O'neill, San Marcos, CA (US);
Ronald Martin Pearlstein, San Marcos, CA (US);
Richard Ho, Anaheim, CA (US);
Haripin Chandra, Carlsbad, CA (US);
Agnes Derecskei-kovacs, Macungie, PA (US);
Manchao Xiao, San Diego, CA (US);
Xinjian Lei, Vista, CA (US);
Bing Han, Beijing, CN;
Mark Leonard O'Neill, San Marcos, CA (US);
Ronald Martin Pearlstein, San Marcos, CA (US);
Richard Ho, Anaheim, CA (US);
Haripin Chandra, Carlsbad, CA (US);
Agnes Derecskei-Kovacs, Macungie, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Described herein are organoaminosilane precursors which can be used to deposit silicon containing films which contain silicon and methods for making these precursors. Also disclosed herein are deposition methods for making silicon-containing films or silicon containing films using the organoaminosilane precursors described herein. Also disclosed herein are the vessels that comprise the organoaminosilane precursors or a composition thereof that can be used, for example, to deliver the precursor to a reactor in order to deposit a silicon-containing film.